{"id":1248,"date":"2020-08-07T17:49:49","date_gmt":"2020-08-07T08:49:49","guid":{"rendered":"http:\/\/www.lnssemi.co.jp\/?page_id=1248"},"modified":"2020-08-12T11:30:56","modified_gmt":"2020-08-12T02:30:56","slug":"main","status":"publish","type":"page","link":"https:\/\/www.lnssemi.co.jp\/?page_id=1248","title":{"rendered":"\u4e3b\u8981\u5b9f\u7e3e"},"content":{"rendered":"\n<p><strong><span data-color=\"#fffd6b\" style=\"background: linear-gradient(transparent 60%,rgba(255, 253, 107, 0.7) 0);\" class=\"vk_highlighter\">\u25c6\u5e73\u5766\u5316\u5de5\u7a0b(CMP Process) <\/span><\/strong><br>\u3000\u30fc\u3000AMAT (Mirra) Stand alone Type\u3068On-trak \u6d17\u6d44\u6a5f\u53ca\u3073<br><span style=\"color:#ffffff\" class=\"has-inline-color\">\u3000\u30fc\u3000<\/span>Mirra Mesa \u30b7\u30ea\u30fc\u30ba\u6539\u9020\u3001 DNS\u793e AS-2000 \u79fb\u8a2d <br>\u3000\u30fc\u3000Wafer\u306eType\u306b\u3088\u308b\u6539\u9020(notch\u2192flat Type)\u30686\u30a4\u30f3\u30c1\u304b\u30898\u30a4\u30f3\u30c1\u306b\u6539\u9020 <br>\u3000\u30fc\u3000Reflexion LK 300mm \u79fb\u8a2d <br>\u3000\u30fc\uff08EBARA\uff09 CMP EPO-113\/222\u3001F-REX 200 Series Head Upgrade(\u30ce\u30fc\u30de\u30eb\u2192I-Head)\u3001<br><span style=\"color:#ffffff\" class=\"has-inline-color\">\u3000\u30fc\u3000<\/span>\u30a4\u30f3\u30c1\u6539\u9020\u3001\u79fb\u8a2d\u2192\u5de5\u7a0b\u30fb\u90e8\u54c1\u306e\u4f9b\u7d66<br>\u3000\u30fc\u3000F-REX 300mm S1\/S2 \u79fb\u8a2d<br><br><strong><span data-color=\"#fffd6b\" style=\"background: linear-gradient(transparent 60%,rgba(255, 253, 107, 0.7) 0);\" class=\"vk_highlighter\">\u25c6\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e Implanter\u5de5\u7a0b\u306e\u6574\u5099<\/span><\/strong><br>\u3000\u30fc\u3000SEN(Axcelis\u306eNOVA)\u88c5\u7f6e\uff1aNV-GSD HE\/LE\u306e\u30a4\u30f3\u30c1\u6539\u9020\u53ca\u3073<br><span style=\"color:#ffffff\" class=\"has-inline-color\">\u3000\u30fc\u3000<\/span>\u4e2d\u53e4\u88c5\u7f6eRefurbish\u3001\u90e8\u54c1\u4f9b\u7d66\u3001\u79fb\u8a2d\u3000 <br>\u3000\u30fc\u3000VARIAN\u88c5\u7f6e\uff1aE220(500)\u3001E1000\u3001120XP\u6d88\u8017\u90e8\u54c1\u306e\u63d0\u4f9b\u53ca\u3073\u90e8\u54c1\u30aa\u30fc\u30d0\u30fc\u30db\u30fc\u30eb\u3001<br><span style=\"color:#ffffff\" class=\"has-inline-color\">\u3000\u30fc\u3000<\/span>\u4e2d\u53e4\u88c5\u7f6eRefurbish\u3001\u79fb\u8a2d<br><br><strong><span data-color=\"#fffd6b\" style=\"background: linear-gradient(transparent 60%,rgba(255, 253, 107, 0.7) 0);\" class=\"vk_highlighter\">\u25c6\u5316\u5b66\u84b8\u7740\u5de5\u7a0b\u88c5\u7f6e(PVD\/CVD\/RTP Process)<\/span><\/strong><br>\u3000\u30fc\u3000(Endura5500)\u79fb\u8a2d\u53ca\u3073Chamber Upgrade<br>\u3000\u30fc\u3000(Centura5200)\u3001(Producer) Chamber Upgrade<br>\u3000\u30fc\u3000(Mattson) SHS2000\u30012800 \u6539\u9020\u53ca\u3073\u79fb\u8a2d<br>\u3000\u30fc\u3000\u90e8\u54c1\u4fee\u7406\u53ca\u3073\u5de5\u7a0b\u90e8\u54c1\u306e\u88fd\u4f5c\u30fb\u4f9b\u7d66<br><br><strong><span data-color=\"#fffd6b\" style=\"background: linear-gradient(transparent 60%,rgba(255, 253, 107, 0.7) 0);\" class=\"vk_highlighter\">\u25c6\u6e2c\u5b9a\u88c5\u7f6e(Hitachi SEM)\u3001(Therma-Wave)\u3001(KLA-TENCOR)<\/span><\/strong><br>\u3000\u30fc\u3000S-8820\u30018840\u30019200 \u30e2\u30c7\u30eb\u306e\u6539\u9020\u30fb\u88dc\u4fee\u53ca\u3073\u79fb\u8a2d\u3001\u90e8\u54c1\u306e\u4f9b\u7d66<br>\u3000\u30fc\u3000OP 2600, 3290\/TP420\u306e\u79fb\u8a2d\u3001AIT-XP \u90e8\u54c1\u63d0\u4f9b<br><br><strong><span data-color=\"#fffd6b\" style=\"background: linear-gradient(transparent 60%,rgba(255, 253, 107, 0.7) 0);\" class=\"vk_highlighter\">\u25c6\u8755\u523b\u88c5\u7f6e\u5de5\u7a0b(Etcher Process)<\/span><\/strong><br>\u3000\u30fc\u3000Hitachi M501, 502, 602A \u4e2d\u53e4\u88c5\u7f6eRefurbish\u3001\u6539\u9020\u3001\u79fb\u8a2d<br>\u3000\u30fc\u3000P5000,Centura5200 DPS, DPS +Chamber Upgrade\u53ca\u3073\u79fb\u8a2d<br>\u3000\u30fc\u3000LAM TCP9600, Rainbow\u30b7\u30ea\u30fc\u30ba\u3000Refurbish\u3001\u30a4\u30f3\u30c1\u6539\u9020\u3001\u79fb\u8a2d<\/p>\n\r\n\n","protected":false},"excerpt":{"rendered":"<p>\u88c5\u7f6e\u30e2\u30b8\u30e5\u30fc\u30eb\u5225\u306e\u4e3b\u8981\u5b9f\u7e3e<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-1248","page","type-page","status-publish","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=\/wp\/v2\/pages\/1248"}],"collection":[{"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1248"}],"version-history":[{"count":10,"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=\/wp\/v2\/pages\/1248\/revisions"}],"predecessor-version":[{"id":1262,"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=\/wp\/v2\/pages\/1248\/revisions\/1262"}],"wp:attachment":[{"href":"https:\/\/www.lnssemi.co.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1248"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}